Grinding Tape
研磨膠帶可保護晶圆表面電路,防止在晶圓背面研磨過程中出現損壞或污染。
UV440 | UV595 | UV170 | |
Base Film : | PET | PET | PET |
Base Film Thickness | 75 um | 75 um | 50um |
Intermediate | 315 | 500 | 100 |
Adhesive Base: | Acrylic | Acrylic | Acrylic |
UV Adhesive | 50 | 20 | 20 |
Total Thickness | 440 | 595 | 170 |
180°Peel AF after UV (unit : g/25 mm) on SUS | 30↓ | ||
180°Peel AF before UV (unit : g/25 mm) on SUS | 550±100 | 400↓ | 1300±200 |
Lamination Condition | 65±10℃ @1mins | 65±10℃ @ 1mins | 25±5℃ |
UV release amount | 360~500mj/cm2 | 250~500mj/cm2 | 360~500mj/cm2 |
Product | Adhesive thickness | Base Film | Extra Process | Adhesion Strength |
PI Tape | 8um~120um | PI 12.5um~150um | Punch/split/ESD | 5g~2,000g |
UV Tape | *8um~80um(~400um) | PO 80um/150um PET 25um~100um | 300g~2,000g | |
Thermal release tape | 40um~60um | PET/PI 25um/50um/100um | Punch /split/ESD | 100g~600g |
Heterogeneous Integration | Thickness | Remark |
DAF | 10um~120um | *under development |
Laser Debond material | 10um~50um / 0.5um~1.5um | Film/Liquid |